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6-95 (technical revision)
Pitting corrosion is a potential corrosion failure mechanism in semiconductor gas delivery systems
1 Purpose
it is not applicable to cylinder gas or oxygen gas in its liquid state
C00323 - SEMI C3.23 - Standard for Oxygen (O2), 99.98% Quality Revision:SEMI C3.23-1000 (Withdrawn 1104) - Withdrawn 6-95 (technical revision)This Standard was technically approved by the Gases Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on July 11, 2004. Available at www. semi. org in November 2004; originally published in 1984; previously published in 1995. NOTICE: This Document was balloted and approved for withdrawal in 2004. Oxygen is a colorless, odorless, and oxidizing gas. It supports combustion. Referenced SEMI
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